Design and implementation of a temperature-insensitive heterogeneous resonant magnetic field sensor-Reference-Cited by-同舟云学术

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Design and implementation of a temperature-insensitive heterogeneous resonant magnetic field sensor

Published:2024-04 Issue: Volume:369 Page:115180
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Huang Zijun,Bian Leixiang,Xu Zhan,Zhang Yuntao

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Reference32 articles.

1. A low-power resonant micromachined compass;Leichlé;J. Micromech. Microeng.,2004

2. Design, fabrication, and characterization of a resonant magnetic field sensor based on MEMS technology;Herrera-May;Integr. Ferroelectr.,2011

3. Resonant magnetic field sensor with frequency output;Sunier;J. Microelectromech. Syst.,2006

4. A resonant micromachined magnetic field sensor;Bahreyni;IEEE Sens. J.,2007

5. A MEMS-based magnetic field sensor with simple resonant structure and linear electrical response;Herrera-May;Microelectron. Eng.,2015

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