Design, Fabrication, and Characterization of a Resonant Magnetic Field Sensor Based on MEMS Technology-Reference-Cited by-同舟云学术

Design, Fabrication, and Characterization of a Resonant Magnetic Field Sensor Based on MEMS Technology

Published:2011-01 Issue:1 Volume:126 Page:94-105
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Herrera-May A. L.¹²,García-Ramírez P. J.¹,Aguilera-Cortés L. A.²,Martínez-Castillo J.¹,Juárez-Aguirre R.¹,Domínguez-Nicolás S. M.¹,Bravo-Barrera C. F.³,Figueras E.⁴

Affiliation:

1. a Centro de Investigación en Micro y Nanotecnología , Universidad Veracruzana , Calzada Ruiz Cortines 455, C. P. 94292, Boca del Río, Ver., Mexico

2. b Depto. Ingeniería Mecánica , Campus Irapuato-Salamanca, Universidad de Guanajuato , Carretera Salamanca-Valle de Santiago km 3.5+1.8 km, C. P. 36885, Salamanca, Gto., Mexico

3. c Oficina Mecánica y Materiales , Laboratorio de Pruebas de Equipos y Materiales , Av. Apaseo Oriente s/n, Cd. Industrial, C. P. 36541, Irapuato, Gto., México

4. d Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC) , Campus UAB, C. P. 08193, Bellaterra, Barcelona, Spain

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2011.575013

Reference29 articles.

1. The MEMS Handbook

2. Modeling and fabrication of a MEMS magnetostatic magnetic sensor

3. Magnetic sensors and their applications

4. Resonant Magnetic Field Sensors Based On MEMS Technology

5. Measurement of the spatial sensitivity of miniature SQUIDs using magnetic-tipped STM

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and implementation of a temperature-insensitive heterogeneous resonant magnetic field sensor;Sensors and Actuators A: Physical;2024-04

2. Design and Implementation of a Temperature-Insensitive Heterogeneous Resonant Magnetic Field Sensor;2023

3. An out-of-plane electromagnetic induction based resonant MEMS magnetometer;Sensors and Actuators A: Physical;2019-01

4. Design, fabrication and characterization of a resonant magnetic field sensor based on mechanically coupled dual-microresonator;Sensors and Actuators A: Physical;2016-09

5. Resonant Magnetic Field Sensor With Capacitive Driving and Electromagnetic Induction Sensing;IEEE Electron Device Letters;2013-03