Author:
Satchell D.W.,Greenwood J.C.
Reference4 articles.
1. Silicon microengineering for accelerometers;Satchell;Proc. Int. Conf. Mechanical Technology of Inertial Devices, Newcastle,791987
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3. Miniature silicon resonant pressure sensor;Greenwood;IEE Proc.,1988
4. Electrothermally excited silicon beam mechanical resonators;Othman;Electron. Lett.,1987
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