Publisher
Springer Science and Business Media LLC
Reference36 articles.
1. Petersen K, Pourahmadi F, Brown J, Parsons P, Skinner M and Tudor J 1991 Resonant beam pressure sensor fabricated with silicon fusion bonding. TRANSDUCERS'91: IEEE International Conf. on Solid-State Sensors and Actuators. Digest of Technical Papers, pp. 664–667
2. Sharma A, Kumar V and Kaur H J 2022 Analysis of a micro-resonant pressure sensor with docked clamped-clamped micro-beam. In: AIP Conference Proceedings 2451: 020018
3. Tai-Ran H 2008 MEMS and Microsystems: Design and Manufacture. 1st edn. McGraw Hill, New York
4. Sharma A, Kumar V and Kaur H J 2022 Finite Element Analysis for Design Optimization of MEMS Double Ended Tuning Fork Resonator. ECS Transactions 107: 4697
5. Zhang Q, Li C, Zhao Y and Zhang Z 2021 A Quartz Resonant Ultra-High Pressure Sensor With High Precision and High Stability. IEEE Sens. J. 21: 22553–22561
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Research on Portable Resonant Density Meter;2023 IEEE 16th International Conference on Electronic Measurement & Instruments (ICEMI);2023-08-09
2. Study of MEMS DETF Resonator for Performance Evaluation Based on the Impact of TED;2023 2nd Edition of IEEE Delhi Section Flagship Conference (DELCON);2023-02-24