Dimensional optimization and modelling of a novel double-ended-tuning-fork micro-resonator for high frequency applications-Reference-Cited by-同舟云学术

Dimensional optimization and modelling of a novel double-ended-tuning-fork micro-resonator for high frequency applications

Published:2023-01-21 Issue:1 Volume:48 Page:
ISSN:0973-7677
Container-title:Sādhanā
language:en
Short-container-title:Sādhanā

Author:

Sharma Anshu^ORCID,Kaur Harsimran Jit,Kumar Vijay

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Link

https://link.springer.com/content/pdf/10.1007/s12046-022-02070-3.pdf

Reference36 articles.

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2. Sharma A, Kumar V and Kaur H J 2022 Analysis of a micro-resonant pressure sensor with docked clamped-clamped micro-beam. In: AIP Conference Proceedings 2451: 020018

3. Tai-Ran H 2008 MEMS and Microsystems: Design and Manufacture. 1st edn. McGraw Hill, New York

4. Sharma A, Kumar V and Kaur H J 2022 Finite Element Analysis for Design Optimization of MEMS Double Ended Tuning Fork Resonator. ECS Transactions 107: 4697

5. Zhang Q, Li C, Zhao Y and Zhang Z 2021 A Quartz Resonant Ultra-High Pressure Sensor With High Precision and High Stability. IEEE Sens. J. 21: 22553–22561

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