Silicon in mechanical sensors
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Link
http://stacks.iop.org/0022-3735/21/i=12/a=001/pdf
Reference157 articles.
1. Corner Undercutting in Anisotropically Etched Isolation Contours
2. Cantilever-type displacement sensor using diffused silicon strain gauges
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