Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration

Author:

Frühauf Joachim,Gärtner Eva,Li Zhi,Doering LutzORCID,Spichtinger Jan,Ehret Gerd

Abstract

The paper deals with cantilevers made from monocrystalline silicon by processes of microtechnology. The cantilevers are passive structures and have no transducers. The application as a material measure for the inspection of stylus forces is in the center of investigations. A simple method is the measurement of the deflection of the cantilever at the position of load by the force if the stiffness of the cantilever at this position is known. Measurements of force–deflection characteristics are described and discussed in context with the classical theory of elastic bending. The methods of determining the stiffness are discussed together with results. Finally, other methods based on tactile measurements along the cantilever are described and tested. The paper discusses comprehensively the properties of concrete silicon chips with cantilevers to underpin its applicability in industrial metrology. The progress consists of the estimation of the accuracy of the proposed method of stylus force measurement and the extraction of information from a tactile measured profile along the silicon cantilever. Furthermore, improvements are proposed for approaches to an ideal cantilever.

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference36 articles.

1. Silicon as a mechanical material

2. Silicon in mechanical sensors

3. Handbook of Silicon Based MEMS Materials and Technologies;Lindroos,2010

4. Overview of residual stress in MEMS structures: Its origin, measurement, and control

5. Shape and Functional Elements of the Bulk Silicon Microtechnique;Frühauf,2005

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