Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference174 articles.
1. R.P. Feynman, “There’s Plenty of Room at the Bottom”, presented at the American Physical Society Meeting in Pasadena, CA, December 26, 1959.
2. R.T. Howe, Surface micromachining for microsensors and microactuators. J. Vacuum Sci. Tech. B 6, 1809 (1988)
3. W.C. Tang, T.C.H. Nuyen, R.T. Howe, Laterally driven polysilicon resonant microstructures. Sens. Act. A 21–23, 25–32 (1989)
4. M.J. Madau, Fundamental of Micro-Fabrication–The Science of Miniaturization (CRC Press, New York, 2002).
5. K.E. Petersen, Silicon as a mechanical material. Proc. IEEE 70, 420–457 (1982)
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献