Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges-Reference-Cited by-同舟云学术

Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges

Published:1990-10 Issue:1-3 Volume:25 Page:79-86
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Tilmans Harrie A.C.,Bouwstra Siebe,Fluitman Jan H.J.,Spence Scott L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

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2. Resonant microsensors;Howe;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

3. Vibration-frequency pressure transducer;Belyaev;Instrum. Constr.,1965

4. Etched silicon vibrating sensor;Greenwood;J. Phys. E: Sci. Instrum.,1984

5. Novel optically excited resonant pressure sensor;Thornton;Electron. Lett.,1988

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