Development of a New Mems Resonant Differential Pressure Sensor with High Accuracy and High Stability

Author:

Cheng Chao,Lu Yulan,Yao Jiahui,Chen Jian,Chen Deyong,Wang Junbo

Publisher

Elsevier BV

Reference34 articles.

1. Development of a high differential pressure piezoelectric active proportional regulation valve using a bending transducer;H Li;IEEE Trans. Ind. Electron,2020

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4. Diaphragm shape effect on the sensitivity of surface acoustic wave based pressure sensor for harsh environment;T Wang;App. Phys. Lett,2015

5. Annularly Grooved Diaphragm Pressure Sensor With Embedded Silicon Nanowires for Low Pressure Application;S Zhang;J. Microelectromech. Syst,2014

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