Monolithic microbridges in silicon using laser machining and anisotropic etching-Reference-Cited by-同舟云学术

Monolithic microbridges in silicon using laser machining and anisotropic etching

Published:1993-06 Issue: Volume:37-38 Page:661-665
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Alavi M.,Fabula Th.,Schumacher A.,Wagner H.-J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

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3. Piezoelectrically driven silicon beam force sensor;Van Mullem;Sensors and Actuators A,1991

4. A sensitive optically excited resonator pressure sensor;Thornton;Sensors and Actuators A,1990

5. New microstructures in silicon using laser machining and anisotropic etching;Alavi;Proc. Micro System Technologies '91, Berlin, Germany,1991

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