Silicon pressure sensor based on a resonating element-Reference-Cited by-同舟云学术

Silicon pressure sensor based on a resonating element

Published:1991-05 Issue:1-3 Volume:27 Page:717-722
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Buser Rudolf A.,De Rooij Nicolaas F.,Schultheis Lothar

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Resonant silicon structures;Buser;Sensors and Actuators,1989

2. Etched silicon vibrating sensor;Greenwood;J. Phys. E: Sci Instrum.,1984

3. Silicon microresonator fibre optic sensors;Culshaw;Proc. Capteurs '89, Paris,1989

4. H. Ohashi, K. Furakawa, M. Atsuta, A. Nakagawa, K. and Imamura, Study of Si-wafer directly bonded interface effect on power device characteristics, IEDM 87, p. 678.

5. Strength of Materials;Timoshenko,1983

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