Author:
Wagner H. -J.,Schumacher A.,Alavi M.,Fabula T.,Schmidt B.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Alavi, M.; Büttgenbach, S.; Schumacher, A.; Wagner, H.-J.: (1991) New microstructures in silicon using laser machining and anisotropic etching. Proc. Micro System Technologies'91, Berlin, Oct. 29-Nov. 1, pp. 322?324
2. Alavi, M.;Fabula T.;Schumacher, A.;Wagner, H.-J.: (1993) Monolithic microbridges in silicon using laser machining and anisotropic etching. Sensors and Actuators A, 37?38, pp. 661?665
3. Buser, R.A.;Schultheis, L.;de Rooij, N.F.: (1991) Silicon pressure sensor based on a resonating element. Sensors and Actuators A, 25?27, pp. 717?722
4. Fabula, T.;Wagner, H.-J.;Schmidt, B.;Büttgenbach, S.: (1994) Triple-beam resonant silicon force sensor based on piezoelectric thin films. Sensors and Actuators A, 41?42, pp. 375?380
5. Greenwood, J.C.;Satchell, D.W.: (1988) Miniature silicon resonant pressure sensor. IEE Proc., 135 (5), pp. 369?372