Triple-beam resonant silicon force sensor based on piezoelectric thin films-Reference-Cited by-同舟云学术

Triple-beam resonant silicon force sensor based on piezoelectric thin films

Published:1994-04 Issue:1-3 Volume:42 Page:375-380
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fabula Th.,Wagner H.-J.,Schmidt B.,Büttgenbach S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

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3. Silicon pressure sensor integrates resonant strain gauge on diaphragm;Ikeda;Sensors and Actuators,1990

4. Miniature silicon resonant pressure sensor;Greenwood;IEE Proc.,1988

5. Survey of quartz bulk resonator sensor technologies;EerNisse;IEEE Trans. Ultrasonics Ferroelectr. Freq. Control UFFC-35,1988

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