1. Resonator sensors—a review;Langdon;J. Phys. E: Sci. Instrum.,1985
2. Sensors with oscillating elements;Gast;J. Phys. E: Sci. Instrum,1985
3. Resonant microsensors;Howe;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987
4. Analysis of the status and the prospects for improving sensors that measure parameters of production processes in the manufacture of integrated circuits;Kartsev;Sov. Microelectron.,1984
5. Resonant silicon sensors;Stemme;J. Micromechan. Microeng.,1991