1. Pressure dependence of resonant diaphragm pressure sensor;Smits;Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, U.S.A.,11141985
2. Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges;Tilmans;Sensors and Actuators A,1991
3. Zinc oxide thin films for integrated sensor applications;Polla;Tech. Digest, IEEE Solid-State Sensors Workshop, Hilton Head Island, SC, U.S.A.,691986
4. Thin-film ZnO as micromechanical actuator at low frequencies;Blom;Sensors and Actuators,1990
5. F. R. Blom, F. C. M. van de Pol, G. Bauhuis and Th. J. A. Popma, (R.F. planar magnetron sputtered) ZnO films as piezoelectric transducers at low frequencies (part II), Thin Solid Films, submitted for publication.