Author:
Yang E.H.,Yang S.S.,Han S.W.,Kim S.Y.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. Piezoelectric micropump with three valves working peristaltically;Smits;Sensors and Actuators,1990
2. W. Tjhen, T. Tamagawa, C.P. Ye, C.C. Hsueh, P. Schiller and D.L. Polla, Properties of piezoelectric thin films for micromechanical devices and systems, IEEE Microelectromech. Systems Workshop, Nara, Japan, 30 Jan.–2 Feb., 1991, pp. 114–119
3. E. Stemme and G. Stemme, A novel piezoelectric valve-less fluid pump, Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators, (Transducers '93), Yokohama, Japan, 7–10 June, 1993, pp. 110–113
4. T. Gerlach and H. Wurmus, Working principle and performance of the dynamic micropump, IEEE Microelectromech. Systems Workshop, Amsterdam, The Netherlands, 29 Jan.–2 Feb., 1995, pp. 221–226
5. B. Büstgens, W. Bacher, W. Menz and W.K. Schomburg, Micropump manufactured by thermoplastic molding, IEEE Microelectromech. Systems Workshop, Oiso, Japan, 25–28 Jan., 1994, pp. 18–21
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献