P + Structural Layers for Microelectromechanical Systems Using Spin-on Dopants
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Published:2004-09-01
Issue:3
Volume:2
Page:211-216
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ISSN:1546-198X
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Container-title:Sensor Letters
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language:en
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Short-container-title:sens lett
Author:
Proctor Steve P.,Crain Mark M.,Walsh Kevin M.
Publisher
American Scientific Publishers
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics