Author:
Wolffenbuttel R.F.,Goosen J.F.L.,Sarro P.M.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Micro actuators for aligning optical fibers;Jebens;Proc. IEEE Micro Electro-Mechanical Systems Workshop, Salt Lake City, UT, U.S.A.,1989
2. Normally-closed micovalve and micropump fabricated on a silicon wafer;Esashi;Sensors and Actuators,1989
3. Optically excited mechanical vibrations in micromachined silicon cantilever structures;Beneke;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,1987
4. A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices;van de Pol;Sensors and Actuators,1989
5. Laterally-driven polysilicon resonant microstructures;Tang;Sensors and Actuators,1989
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