1. The fabrication of the micro valve by means of micromachining;Esashi;Proc 6th Sensor Symp., Tsukuba, Japan,1986
2. The fabrication of integrated mass flow controllers;Esashi;4th Int. Conf Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,1987
3. Prototype miniature blood gas analyzer fabricated on a silicon wafer;Shoji;Sensors and Actuators,1988
4. Bonding technique for microsensors;Ko,1985
5. Integrated movable micromechanical structures for sensors and actuators;Fan;IEEE Trans. Electron Devices, ED-35,1988