A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices-Reference-Cited by-同舟云学术

A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices

Published:1989-05 Issue:1-2 Volume:17 Page:139-143
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

van de Pol F.C.M.,Wonnink D.G.J.,Elwenspoek M.,Fluitman J.H.J.

Publisher

Elsevier BV

Subject

General Engineering

Reference6 articles.

1. A piezoelectric micropump based on micromachining of silicon;van Lintel;Sensors and Actuators,1988

2. F. C. M. van de Pol et al., to be published.

3. A microminiature electric-to-fluidic valve;Zdeblick;Proc. 4th Int. Conf. on Solid-State Sensors and Actuators, Transducers '87, Tokyo, Japan,251987

4. 1985 Update of the bond graph bibliography;Bos;J. Franklin Inst.,1985

5. Field assisted glass-metal sealing;Wallis;J. Appl. Phys.,1969

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