Design and Measurement of the Peltier Cell Thermal Actuator for Fine Adjustment
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Publisher
Springer International Publishing
Link
https://link.springer.com/content/pdf/10.1007/978-3-030-83368-8_5
Reference13 articles.
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3. Wang, P., Xu, Q.: Design of a flexure-based constant-force XY precision positioning stage. Mech. Mach. Theory 108, 1–13 (2017)
4. Van de Pool, F.C.M., Wonnink, D.G.J., Elwenspoek, M.: A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices. Sens. Actuators 17, 139–143 (1989)
5. Potenkina, A., Wang, C.: Review of electrothermal actuators and applications. Actuators 8, 69 (2019)
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