Integrated silicon capacitive accelerometer with PLL servo technique

Author:

Matsumoto Y.,Esashi M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Precision accelerometers with μg resolution;Rudolf;Sensors and Actuators,1990

2. Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique;Suzuki;Sensors and Actuators,1990

3. H.F. Schlaak, F. Arndt, A. Steckenborn, H.J. Gevatter, L. Kiesewetter and H. Grethen, Mechanical capacitive acceleration sensor with force compensation, Micro System Technologies '90, pp. 617–622.

4. Integrated capacitive accelerometer with novel electrostatic force balancing;Matsumoto;Tech. Digest 11th Sensor Symp., Japan,1992

5. An integrated capacitive absolute pressure sensor;Matsumoto;Trans. IEICE,1992

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