Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication-Reference-Cited by-同舟云学术

Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication

Published:1994-10 Issue:1 Volume:45 Page:57-66
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Legtenberg Rob,Tilmans Harrie A.C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference30 articles.

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3. Resonant silicon sensors;Stemme;J. Micromech. Microeng.,1991

4. Micro resonant force gauges;Tilmans;Sensors and Actuators A,1992

5. Resonant-microbridge vapor sensor;Howe;IEEE Trans. Electron Devices,1986

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