A parametric study of AlN thin films grown by pulsed laser deposition
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference19 articles.
1. P.J. Gielisse, H. Niculescu, in: M.A. Prelas, P. Gielisse, G. Popovici, B.V. Spitsyn, T. Stacy (Eds.), Wide Band Gap Electronic Material, Kluwer Academic, Netherlands, 1995, p. 401.
2. Laser‐induced chemical vapor deposition of AlN films
3. High quality aluminum nitride epitaxial layers grown on sapphire substrates
4. Properties of AlN films grown at 350 K by gas‐phase excimer laser photolysis
5. Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. AlN nucleation and spontaneous pattern formation via combustion of an Al-C-AlF3 mixture in nitrogen;Journal of Crystal Growth;2021-04
2. Morphological diversity of AlN nano- and microstructures: synthesis, growth orientations and theoretical modelling;International Materials Reviews;2019-07-29
3. Texture of the nano-crystalline AlN thin films and the growth conditions in DC magnetron sputtering;Progress in Natural Science: Materials International;2015-08
4. Effect of nitrogen flow ratio on the structural and optical properties of aluminum nitride thin films;Journal of Crystal Growth;2011-07
5. PLD of Piezoelectric and Ferroelectric Materials;Laser-Surface Interactions for New Materials Production;2009-12-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3