Laser‐induced chemical vapor deposition of AlN films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.347035
Reference19 articles.
1. Properties of sputtered nitride semiconductors
2. Optical properties of AlN epitaxial thin films in the vacuum ultraviolet region
3. The intrinsic thermal conductivity of AIN
4. AlN capped annealing of Si implanted semi‐insulating GaAs
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