Features of the process of vacuum-arc produced Ti-plasma flux deposition under gas pressure of 1 to 10 Pa
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference19 articles.
1. Cathodic Arcs: From Fractal Spots to Energetic Condensation;Anders,2008
2. Handbook of Vacuum Arc Science and Technology,1995
3. The effect of nitrogen pressure on cathodic arc deposited NbN thin films
4. Effects of nitrogen pressure on arc-evaporated TiN coatings
5. Influence of the nitrogen pressure on the structure and properties of (Ti,Al)N coatings deposited by cathodic vacuum arc PVD process
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