The effect of nitrogen pressure on cathodic arc deposited NbN thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference39 articles.
1. Improvements of performance on sputter-coated niobium films for superconducting cavities by adding a NbN interlayer
2. The effect of the deposition rate on the properties of d.c.-magnetron-sputtered niobium nitride thin films
3. Superconducting niobium and niobium nitride processes for medium-scale integration applications
4. Reactive magnetron sputter deposition of niobium nitride films
5. Plasma-Assisted MOCVD Growth of Superconducting NbN Thin Films Using Nb Dialkylamide and Nb Alkylimide Precursors
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