Optical emission spectroscopy of vanadium cathodic arc plasma at different nitrogen pressure

Abstract

Optical emission spectroscopy studies of vanadium plasma in a cathodic-arc discharge in a nitrogen atmosphere have been carried out. Spectral lines of neutral atoms and ions of the cathode material V, V1+, and V2+, and nitrogen N2 and N2+ were observed in the discharge plasma. Analysis and comparison of the intensity of vanadium and nitrogen spectral lines as a function of nitrogen pressure showed that in vacuum excited ions V2+ and V+ are registered, with increasing pressure, the lines V+*, N2*, and N2+* are observed, and at pressures above 0.5 Pa, the neutral vanadium lines are additionally registered. The electron temperature of Te decreases from 5.9 to 3–4 eV with increasing pressure. Studies of cross-sectional scanning electron microscopy images of VN coatings deposited at different nitrogen pressures have shown that a dense, homogeneous, fine-grained microstructure is formed in the coating when the number of neutral V in the plasma is low, while in the presence of a large number of neutrals, the coating structure changes to a dense structure with columnar growth.