Author:
Kuprin A.S.,Leonov S.A.,Ovcharenko V.D.,Reshetnyak E.N.,Belous V.A.,Vasilenko R.L.,Tolmachova G.N.,Kovalenko V.I.,Klimenko I.O.
Abstract
The paper presents the results of the study on the influence of a high substrate bias voltage from 300 up to 1300 V on the titanium nitride coating deposition under nitrogen pressure of 2 Pa. The deposition rate, phase and chemical composition, adhesion and mechanical properties of coatings, macroparticle number and size distribution were investigated.
Publisher
Problems of Atomic Science and Technology
Reference29 articles.
1. D. Banerjee, J.C. Williams. Perspectives on Titanium Science and Technology // Acta Materialia. 2013, v, 61, p. 844-879.
2. V.A. Belous, V.N. Voyevodin, V.M. Khoro-shikh, G.I. Nosov, V.G. Marinin, S.A. Leonov, V.D. Ovcharenko, V.I. Kovalenko, A.A. Komar, A.S. Kuprin, L.O. Shpagina. Prototype equipment and techniques for obtaining cavitation-resistant coatings to be applied to working surfaces of steam turbine blades made of VT6 titanium alloy in order to replace imported counterparts // Sci. innov. 2016, v. 12 (4), p. 27-35.
3. А.S. Kuprin, V.D. Ovcharenko, S.A. Leonov, G.N. Tolmachova, V.А. Belous, Е.N. Reshetnyak, I.О. Klimenko, М. Kmech. Cavitation erosion of Ti-6Al-4V alloy with vacuum-arc TiN and CrN coatings // Problems of Atomic Science and Technology. 2018, N 5(117), p. 103-108.
4. Anders. Cathodic Arcs: From Fractal Spots to Energetic Condensation. Springer, New York, 2008.
5. Aksenov, V. Belous, V. Padalka, V. Khoro-shikh. Transport of plasma streams in a curvilinear plasma-optics system // Sov. J. Plasma. 1978, v. 4, N 4, р. 425-428.
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献