Author:
Tolstolutskaya G.D.,Kuprin A.S.,Nikitin A.V.,Vasilenko R.L.
Abstract
Processes of sputtering, surface modification and change in the stoichiometric composition of W and WN coatings deposited on stainless steel by cathodic arc evaporation were studied under the influence of low-energy (500 eV/D) deuterium plasma with fluence of (1…4.5)1024 D2 +/m2 at room temperature. The composition of the
WN coating changes under the influence of deuterium plasma, its enrichment with tungsten up to 100 % is observed. Results of erosion studies indicated that the sputtering yields for coatings WN and W are ~ 2.410-2 at./ion and to be systematically higher than the published data which were measured for bulk materials.
Publisher
Problems of Atomic Science and Technology
Subject
Building and Construction,Civil and Structural Engineering,Geotechnical Engineering and Engineering Geology,Arts and Humanities (miscellaneous),Building and Construction,Civil and Structural Engineering,Mechanical Engineering,Biophysics,Safety, Risk, Reliability and Quality,Civil and Structural Engineering,General Engineering,Safety, Risk, Reliability and Quality,Building and Construction,Civil and Structural Engineering,Building and Construction,Civil and Structural Engineering,Molecular Biology,Structural Biology,Mechanical Engineering,Ocean Engineering,Geotechnical Engineering and Engineering Geology,Safety, Risk, Reliability and Quality,Building and Construction,Civil and Structural Engineering,Law,Management, Monitoring, Policy and Law
Cited by
1 articles.
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