Status and challenges in electrical diagnostics of processing plasmas
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference68 articles.
1. Recent progress in thin film processing by magnetron sputtering with plasma diagnostics
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4. Impact of plasma processing on integrated circuit technology migration: From 1 μm to 100 nm and beyond
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