Recent progress in thin film processing by magnetron sputtering with plasma diagnostics
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/42/i=4/a=043001/pdf
Reference128 articles.
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