Microwave PECVD for large area coating-Reference-Cited by-同舟云学术

Microwave PECVD for large area coating

Published:2005-10 Issue:1-4 Volume:200 Page:21-25
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Liehr M.,Dieguez-Campo M.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference10 articles.

1. E. Räuchle, Lecture at Third International Workshop on Microwave Discharges: Fundamentals and Applications. Abbaye de Fontevraud, France, 20–25 April 1997.

2. H. Ranke, H. Bickmann, W. Kemmner, E. Räuchle, T. Magg, German patent publication No. DE 4136297 A1, 6 May 1993.

3. E. Räuchle, W. Petasch, F.K. Räuchle, H. Mügge, German Patent DE 19503205 C1, 2 May 1995.

4. H. Muegge, Muegge Electronic GmbH, private communication.

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