Enhanced mechanical and electrochemical properties of TiNx thin films prepared by magnetron sputtering with an anode layer ion source
Author:
Funder
Hong Kong Research Grants Council
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference30 articles.
1. Magnetron sputtering: a review of recent developments and applications;Kelly;Vacuum,2000
2. Thin film deposition using energetic ions;Manova;Materials,2010
3. Microstructure and mechanical properties of Cr–N coatings by ion-beam-assisted magnetron sputtering;Tian;Mater. Sci. Eng. A,2008
4. Ion beam based composition and texture control of titanium nitride;Ensinger;Vacuum,2013
5. Ion bombardment effects during deposition of nitride and metal films;Ensinger;Surf. Coat. Technol.,1998
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