Ion beam based composition and texture control of titanium nitride
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference21 articles.
1. Fundamentals of ion-beam-assisted deposition: Technique and film properties
2. Use of ion beam assisted deposition to modify the microstructure and properties of thin films
3. Ion beam assisted deposition for metal finishing
4. Low energy ion assist during deposition — an effective tool for controlling thin film microstructure
5. Coating Films of Titanium Nitride Prepared by Ion and Vapor Deposition Method
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. EFFECT OF NITROGEN CONCENTRATION ON TITANIUM NITRIDE THIN FILM FORMATION;International Journal of Mathematics and Physics;2023-12
2. Effect of titanium addition on structure, corrosion resistance and mechanical properties of aluminum coatings on NdFeB by ion-beam-assisted magnetron sputtering;Vacuum;2020-11
3. Enhanced mechanical and electrochemical properties of TiNx thin films prepared by magnetron sputtering with an anode layer ion source;Surface and Coatings Technology;2019-05
4. Effects of ion flux density and energy on the composition of TiNx thin films prepared by magnetron sputtering with an anode layer ion source;Surface and Coatings Technology;2019-05
5. Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target;Materials Letters;2016-05
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