Use of ion beam assisted deposition to modify the microstructure and properties of thin films
Author:
Publisher
Informa UK Limited
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Link
http://www.tandfonline.com/doi/pdf/10.1179/095066090790323975
Reference115 articles.
1. Recoil implantation of materials
2. Ion-based methods for optical thin film deposition
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