Author:
Hofer-Roblyek Anna M.,Pichler Karl-Heinz,Linke Christian,Franz Robert,Winkler Jörg,Mitterer Christian
Funder
Österreichische Forschungsförderungsgesellschaft
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference25 articles.
1. Magnetron sputtering - milestones of 30years;Bräuer;Vacuum,2010
2. Rotatable magnetron sputter technology for large area glass and web coating;Blondeel;Vak. Forsch. Prax.,2009
3. Innovations in Magnetic Systems for Rotatable Sputter Magnetrons;De Bosscher,2014
4. Dynamic interaction in the physical properties of magnetron deposition systems;Rossnagel;Mater. Sci. Eng. A,1991
5. H.E. McKelvey, Magnetron cathode sputtering apparatus, US Patent 4356073, 1982.
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献