Remanufacturing of the waste refractory Mo–10Nb sputtering target by spark plasma sintering technology
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference32 articles.
1. A novel surface design for preparing a Mo-10%Nb sputtering target with ultra-low oxygen content: coating a NbC layer on Nb powder particles via chemical vapour reaction under CH4 atmosphere;Zhang;Surf. Coating. Technol.,2020
2. Densification, grain growth mechanism and mechanical properties of Mo-10Nb refractory targets fabricated by SPS;Huang;Int. J. Refract. Metals Hard Mater.,2021
3. Changes in the oxygen content, morphology, and microstructure of Mo-10Nb composite powders during mechanical alloying;Li;Adv. Powder Technol.,2020
4. Application and preparation technology of refractory metal sputtering target;Wang;China Tungsten Industry,2019
5. The application, manufacture and developing trend of molybdenum sputtering target;An;China Molybdenum Industry,2011
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Microstructural comparison of hot isostatically pressed Mo 10Nb alloys before and after hot rolling;Materials Characterization;2024-05
2. Study on microstructures, properties and mechanisms of sinter-joining refractory metal W 30Si powders and sputtering targets by spark plasma sintering technique;International Journal of Refractory Metals and Hard Materials;2024-04
3. Effects of Sintering Temperature on MoOx Target and Film;Coatings;2022-10-26
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