Rotatable Magnetron Sputter Technologyfor Large Area Glass and Web Coating

Author:

Blondeel Anja,Persoone Peter,De Bosscher Wilmert

Publisher

Wiley

Subject

Surfaces, Coatings and Films,Condensed Matter Physics

Reference13 articles.

1. A. Blondeel et al., „Advantages of Using Rotating Cylindrical ITO Targets for Large Area Coating Applications”︁, 49th Annual Technical Conference Proceedings of the Society of Vacuum Coaters, pp. 187-191, 2006.

2. K.P. Gibbons et al., „ITO Coatings for Display Applications”︁, 40th Annual Technical Conference Proceedings of the Society of Vacuum Coaters, pp. 216-220, 1997.

3. S. J. Nadel et al., „Equipment, materials and processes: a review of high rate sputtering technology for glass coating”︁, Thin Solid Films, 442, 11, 2003.

4. M. Rittner, „GB-232R Sputtering Targets and Sputtering Films: Technology and Markets, 2002”︁, Business Communications Company Inc

5. W. De Bosscher et al., „New Sputter Targets and Sputter Hardware offering Further Cost Reductions for Large Area Coatings”︁, Vacuum Technology and Coatings, September 2005.

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