Use of a synchrotron X-ray microbeam to map composition and structure of multimetallic metal oxide films deposited by combinatorial chemical vapor deposition-Reference-Cited by-同舟云学术

Use of a synchrotron X-ray microbeam to map composition and structure of multimetallic metal oxide films deposited by combinatorial chemical vapor deposition

Published:2007-09 Issue:22-23 Volume:201 Page:9041-9045
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Xia Bin,Chu Yong S.,Gladfelter Wayne L.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference29 articles.

1. COMBINATORIAL MATERIALS SYNTHESIS AND SCREENING: An Integrated Materials Chip Approach to Discovery and Optimization of Functional Materials

2. Discovery of a useful thin-film dielectric using a composition-spread approach

3. Economical Sputtering System To Produce Large-Size Composition-Spread Libraries Having Linear and Orthogonal Stoichiometry Variations

4. A combinatorial approach in oxide/semiconductor interface research for future electronic devices

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Molecular precursor approach to metal oxide and pnictide thin films;Coordination Chemistry Reviews;2013-12

2. Aerosol-assisted delivery of precursors for chemical vapour deposition: expanding the scope of CVD for materials fabrication;Dalton Transactions;2013

3. Inorganic thin-film combinatorial studies for rapidly optimising functional properties;Chem. Soc. Rev.;2012

4. The use of combinatorial aerosol-assisted chemical vapour deposition for the formation of gallium-indium-oxide thin films;Journal of Materials Chemistry;2011

5. Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2010-09