Discovery of a useful thin-film dielectric using a composition-spread approach

Author:

van Dover R. B.,Schneemeyer L. F.,Fleming R. M.

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Reference14 articles.

1. The National Technology Roadmap for Semiconductorspage 123 (Sematech, Austin, (1994)); also http://www.sematech.org/public/roadmap/ntrs94.pdf .

2. El-Kareh, B., Bronner, G. B. & Schuster, S. E. The evolution of DRAM cell technology. Solid State Technol. 89–101 (May (1997)).

3. Gerstenberg, D. in Handbook of Thin Film Technology (eds Maissel, L. & Glang, R.) Ch. 19, page 8 (McGraw-Hill, New York, (1970)).

4. Waser, R., Baiatu, T. & Härdtl, K.-H. DC electrical degradation of perovskite-type titanates: I, ceramics. J. Am. Ceram. Soc. 73, 1645–1653 (1990).

5. Baiatu, T., Waser, R. & Härdtl, K.-H. DC electrical degradation of perovskite-type titanates: I, Ceramics. J. Am. Ceram. Soc. 73, 1663–1673 (1990).

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