Economical Sputtering System To Produce Large-Size Composition-Spread Libraries Having Linear and Orthogonal Stoichiometry Variations
Author:
Affiliation:
1. Department of Physics, Dalhousie University, Halifax, Nova Scotia B3H 3J5, Canada
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm020236x
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