Aerosol-assisted delivery of precursors for chemical vapour deposition: expanding the scope of CVD for materials fabrication
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Inorganic Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2013/DT/C3DT50607J
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1. Chemical vapour deposition of coatings
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