Spatial control over atomic layer deposition using microcontact-printed resists
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference49 articles.
1. Handbook of Thin Film Materials;Ritala,2002
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5. Growth Per Cycle in Atomic Layer Deposition: Real Application Examplesof a Theoretical Model
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