Detecting and Removing Defects in Organosilane Self-Assembled Monolayers
Author:
Affiliation:
1. Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, United States
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.langmuir.9b02753
Reference48 articles.
1. An Intrinsic Relationship between Molecular Structure in Self-Assembled n-Alkylsiloxane Monolayers and Deposition Temperature
2. Effects of Surface Hydrophobization on the Growth of Self-Assembled Monolayers on Silicon
3. Self-assembled monolayer resist for atomic layer deposition of HfO2 and ZrO2 high-κ gate dielectrics
4. Monitoring and Mapping Imperfections in Silane-Based Self-Assembled Monolayers by Chemical Amplification
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