Surface Chemistry for Atomic Layer Growth
Author:
Affiliation:
1. Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309-0215
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry,General Engineering
Link
https://pubs.acs.org/doi/pdf/10.1021/jp9536763
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1. Gigabit age microelectronics and their manufacture
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4. Epitaxial metal oxide films, a leading candidate for 21st century thin film technology
5. Atomic layer epitaxy
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