Stresses in passivated lines from curvature measurements
Author:
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. X-Ray Strain Measurements in Fine-Line Patterned AL-CU Films
2. Characteristics of thermal stresses in Al(Cu) fine lines. II. Passivated line structures
3. Measurement of thermal stress and stress relaxation in confined metal lines. I. Stresses during thermal cycling
4. The Effect of the Passivation Material on the Stress and Stress Relaxation Behavior of Narrow Al-Si-Cu Lines
5. Stresses, curvatures, and shape changes arising from patterned lines on silicon wafers
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