Measurement of thermal stress and stress relaxation in confined metal lines. I. Stresses during thermal cycling
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.354826
Reference13 articles.
1. Stress-voiding of narrow conductor lines
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5. Residual stress measurements of thin aluminum metallizations by continuous indentation and x-ray stress measurement techniques
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