Time decay of stress induced leakage current in thin gate oxides by low-field electron injection

Author:

Cester A,Paccagnella A,Ghidini G

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Behaviour of the Si/SiO2 interface observed by Fowler–Nordheim tunnelling;Maserjian;J Appl Phys,1982

2. Correlation of stress-induced leakage current in thin oxides with trap generation inside the oxides;Dumin;IEEE Trans Electron Dev,1993

3. Thickness dependence of stress-induced leakage currents in silicon oxide;Runnion;IEEE Trans Electron Dev,1997

4. The charging and discharging of high-voltage stress-generated traps in thin silicon oxide;Scott;IEEE Trans Electron Dev,1996

5. Sakakibara K, Ajika N, Hatanaka M, Miyoshi H. A quantitative analysis of stress excess current (SIEC) in SiO2 films. IEEE Proc Int Rel Phys Symp, 1994

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