Zone-melting recrystallization of thick silicon on insulator films
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference17 articles.
1. Seeded recrystallization of thick polysilicon films on oxidized 3‐in. wafers
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3. Zone‐melting recrystallization of encapsulated silicon films on SiO2—morphology and crystallography
4. Zone‐Melting Recrystallization of Si Films with a Moveable‐Strip‐Heater Oven
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